High-resolution X-ray inspection technology is based on the principles of the shadow X-ray microscope:
X-rays travel from the almost punctiform X-ray source to the object, through which they pass, to the detector where they project an image of the object onto the detector screen, the image magnification being M= Focus-Detector-Distance/Focus-Object-Distance.
Microscopically small object details can be imaged at high magnifications and can even be captured by means of real-time detectors with an average resolution of a tenth of millimeter.
Click on an image to view how geometric magnification works on the example of a semiconductor product.